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Recommended test chambers for the semiconductor industry

Logos of representative semiconductor, electronics and research customers

Environmental test chamber applications in semiconductor manufacturing

In recent years, the hottest industries in China have been semiconductors and new energy. As a benchmark industry in the high-tech sector, the semiconductor sector has received strong support from national policies. Authoritative departments predict that with the rapid development of technologies such as AI large models, China’s semiconductor industry will surpass 2.5 trillion RMB by 2025. China has become one of the world’s largest semiconductor markets, with many outstanding companies emerging from upstream and downstream in the industry chain. For example, silicon wafer companies like Zhonghuan Co., process manufacturing equipment companies like Shanghai Microelectronics and Shenzhen Xinkailai, semiconductor design companies like Unigroup Guowei and Huawei HiSilicon, wafer manufacturers TSMC and SMIC, and chip companies like Hygon Information and Cambricon.

Diagram of the semiconductor value chain from materials and design to applications
The diagram maps upstream materials and equipment, midstream design and fabrication, and downstream applications.

(Panoramic view of the semiconductor industry chain, sourced from publicly available information on the internet. If there is any infringement, please contact for removal.)

Throughout the entire chip manufacturing and packaging and testing process, thousands of processing steps are involved. One of the most important tasks is environmental reliability testing, which includes temperature, humidity, low pressure, temperature shock, and comprehensive testing of equipment, components, and chips. Compared to other industries, the semiconductor sector has higher environmental reliability testing requirements and pays more attention to high-precision testing performance and quality stability in environmental test chambers, which is precisely the strength of SCICOOLING’s products.

SCICOOLING originated from the pilot workshop of the Institute of Physics and Chemistry, Chinese Academy of Sciences. It has focused on the research, development, and manufacturing of environmental test equipment for over 20 years. Its main products include high and low temperature (damp heat) test chambers, impact test chambers, rotary table support/vibration isolation platform test chambers, altitude test chambers, and combined environmental systems Test chambers, walk-in test chambers, ultra-low temperature equipment, etc. are widely used in aerospace, high-reliability equipment, electronic communications, semiconductors, new energy, and other industries. The products feature superior performance, reliable quality, energy saving, and environmental protection, with numerous examples such as “temperature test chambers still in good condition after 14 years, continuous low-temperature continuous testing for 2880 hours, two-box basket impact boxes with unlimited cycles of thermal shock,” 180°C ultra-low-temperature test chamber, 7°C/7%RH low-temperature low-humidity test chamber, and other cases.

Taking the semiconductor industry as an example, representative companies that have cooperated with SCICOOLING to date include: China Electronics, CETC, Sanle Electronics, Huawei, NAURA (leading domestic high-end semiconductor equipment company), Hygon Information (leader in CPU+GPU domestic substitution), GigaDevice (leading domestic memory chip and MCTU chip company), Jingjia Microelectronics (leading domestic GPU company), Jiejie Microelectronics (leading domestic thyristor company), Haier, Hisense, AAC Technology, Ruifeng Optoelectronics, Chengdu Yaguang Electronics, InnoTech Linco, Beidou Xingtong, and others.

Collage of SCI environmental chambers used in semiconductor testing
A multi-image collage presents temperature, humidity, altitude and combined-test chamber installations.

Below are some cases of the SCICOOLING Environmental Reliability Test Chamber in the semiconductor industry:

  1. Complex non-standard combined environmental test chamber – Beijing
SCI combined temperature, humidity and vibration test system
A blue-front chamber is integrated with external vibration equipment and control hardware.

Ø Combined temperature and humidity vibration environmental test chamber

Ø Equipment Applications: Used for temperature and humidity vibration testing of satellite navigation chips, modules, boards, antennas, microwave ceramic devices, etc.

Ø Main Technical Parameters: Nominal capacity: 520L Temperature range: -70°C~+150°C Temperature change rate: ≥10°C/min Humidity range: 10%~98% RH

  1. Rapid temperature change temperature test chamber – Qingdao
SCI rapid temperature change test chamber in a semiconductor facility
A red-and-gray chamber with external controller is installed for fast thermal cycling.

Ø Rapid temperature change temperature test chamber

Ø Equipment Purpose: Used for testing various semiconductor devices and integrated circuits, microwave modules, components, etc

Ø Main Technical Parameters:

Nominal volume: 1000L; Temperature range: -75°C~+150°C; Temperature change rate: ≥15°C/min (linear)

  1. Near-vacuum altitude test chamber – Nanjing
SCI high and low temperature altitude test chamber
The chamber combines a sealed workspace, circular window, side controller and pressure system.

Ø High and low temperature altitude test chamber

Ø Equipment Purpose: Used for testing electronic components, microwave power devices, and more.

Ø Main Technical Parameters: Nominal capacity: 216L Temperature range: -50°C~+150°C Temperature change rate: ≥2°C/min Pressure range: Atmospheric pressure ~10Pa

  1. High-precision temperature test chamber – Hefei
Rows of SCI temperature chambers in a semiconductor reliability laboratory
Multiple chambers operate along marked aisles in a clean semiconductor test area.

Ø temperature test chamber

Ø Equipment Applications: Used for testing electronic components, microwave power devices, etc.

Ø Main Technical Parameters:

Nominal volume: 20L~500L; Temperature range: -75°C~+150°C; Temperature change rate: ≥2°C~10°C/min

  1. High and low temperature and humidity test chamber for vibration isolation platform – Wuhan
SCI temperature and humidity chambers installed with vibration-isolation platforms
A line of large chambers is configured for vibration-isolated semiconductor tests.

Ø Vibration isolation platform high and low temperature and humidity test chamber

Ø Equipment Applications: Used for testing MEMS sensors and actuator chips for consumer and automotive applications.

Ø Main Technical Parameters: Nominal Capacity: 250L~550L Temperature range: -75°C~+150°C Temperature change rate: ≥5°C~20°C/min

Humidity range: 10%~98% RH

Related Resources & Next Step

Review SCI’s semiconductor testing solutions, compare thermal shock test chambers, or discuss a MEMS or semiconductor qualification project with our team.

  Need to evaluate a test profile or configure a chamber? Explore the relevant SCICOOLING solution and submit your project requirements.  

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